Effects of N2-Based Annealing on the Reliability Characteristics of Tungsten/La2O3/Silicon Capacitors
نویسندگان
چکیده
In this paper, we report the effects of a N2 postmetallization annealing PMA on the reliability and charge-trapping characteristics of tungsten/La2O3/silicon structures. The samples are stressed with a constant-voltage stressing CVS with substrate injection. After the stressing we found that the flatband voltage VFB of the samples positively shifts, indicating a net negative charge trapped in the La2O3 and its interfaces. Samples with PMA exhibit less VFB shift after the stressing as compared to postdeposition annealing La2O3 films. Moreover, La2O3 with PMA at higher temperatures increases the endurance to VFB shift, but the equivalent oxide thickness EOT of the metal-insulator-semiconductor capacitors increases; thus, a trade-off between higher endurance to charge trapping and low EOT is required. The reliability and electrical characteristics of La2O3 films are to some extent sensitive to the annealing conditions and timing within the process flow. © 2007 The Electrochemical Society. DOI: 10.1149/1.2712823 All rights reserved.
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